Pagpaila sa wafer carrier
KATEGORYA SA PRODUKTO
▶Wafer Carrier System para sa Proseso sa PECVD & TALOX
• PECVD & TALOX Graphite Boat (M4~M12)
• Vertical SM-Boat (M4, M6)
• Implant & shower Graphite Part (M4~M6)
• C/C Tray & Ceramic Coating
• Metal RIE-Tray & Ceramic Coating
• Vacuum Sealing : O-Ring & SQ-Ring
▶Proseso sa Pagbalhin sa Texturing ug Basa nga Etching
• LSC H-Carrier o cassette (M4~M12)
• LSC V-Carrier o cassette (M4~M12)
• ASC Carrier o cassette (M4, M6)
• W/F Carrier & Storage Box (M4~M12)
• Serye sa Transport Wheel (Roller).
▶Solar Cell Carrier ug Metal Carrier
• TRC Carrier o cassette (M4~M12)
• Magasin (uban ang BELT)
GRAPHITE BOAT (H-Type)
19P6-216CT (WF M4~M12)
GRAPHITE BOAT (H-Type)
21P6-240CT WF M4~M12)
GRAPHITE BOAT (H-Type)
23P7-308CT(W/F M4~M12)
GRAPHITE BOAT (H-Type)
22P/7-294TP (W/F M4~M12)
GRAPHITE BOAT (H-Type)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
WF CARRIER & STORAGE BOX (~M12)
C/C TRAY o CARRIER(M4~M10)
C/C TRAY o CARRIER(M4~M10)
VERTICAL BOAT (SM) M6
LSC-H-CARRIER(~M12)
LSC-V-CARRIER(~M12)
ASC CARRIER (~M6)
TRC CARRIER(~M12)
TRC CARRIER(~M12)
GRAPHITE-BOAT(M12)
Sistema sa Wafer Carrier alang sa Proseso sa PECVD
▶ GRAPHITE BOAT (CT-Designed) M10/M12 Proseso
• SPECIAL DESIGN CONCEPT
▶ GRAPHITE BOAT (CT-Designed) M4/M6 Proseso
▶ Mga Bahin sa Kagamitan sa Bangka
▶ VERTICAL BOAT-161.7mm WAFER
▶ VERTICAL BOAT-166mm WAFER
▶ VERTICAL BOAT-161.7mm, 166mm WAFER
Solar Cell Carrier ug Metal TRC Carrier
TYPE: Automation
WAFER GAKI: ① 156×156MM ② 156.75×156.75MM
③161.7x161.7MM ④166x166MM
⑤ 180×180mm ⑥ 210×210mm
PAGGAMIT: Pagdala (Cassette)
KAPASIDAD: 100 ka panid
PITCH: 4.76MM/5.953mm/6.35mm
DIMENSYON: Gibanabana nga 559 × 220 × 220MM
Gibanabana nga 712 × 260 × 260MM
ADVANTAGE: Atmospera
MATERYAL: FLAME, SIDE BAR-Aluminum (anodizing)
SIDE PLATE-POM (Antistatic)
Hapin sa ubos nga bar-EPDM/PU/VITON (ASE)